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Our online catalog is being updated! Please contact us for current pricing.
Selecting a Valve
Since 1958, Thermionics has manufactured over 65,000
qualified valves. Thermionics manufactures the broadest line of vacuum valves.
They have been tested and judged the highest quality valves manufactured
in the United States.
Full Conductance
The figure of merit of a vacuum valve is
its conductance, i.e., the amount of gas that passes from the plane of the inlet valve
port to the plane of the outlet port of the valve in
1 sec per unit of pressure differential.
The inside diameter, the length of the tube, and any constrictions or
obstructions can adversely affect conductance. Be
certain that the gate or poppet of your valve opens fully and does not interfere with
gas flow. The inside diameter of the port is almost meaningless as a specification
unless full conductance is offered.
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| TLI valves open fully |
Competitors' valves may not |
Valves that provide full conductance
are qualified valves; those that do not might
be referred to as unqualified or
counterfeit valves. All Thermionics valves open fully
and provide full conductance under all conditions.
We have included some computed conductances with some of our
valve specifications. Because the short tube approximation to the conductance
equation was used, ignoring the larger diameter in the
valve body area, computed conductances are slightly understated.
Valve Choice Criteria
- When deciding to specify either manual
or electro-pneumatic actuation for the
valve, consider frequency of use, available utilities, and operator attention
required when the valve is actuated.
- Select a valve capable of withstanding
the bakeout temperature required to reach the base pressure desired in the
time required.
- All Thermionics valves are designed
and
manufactured to reach and maintain very low vacuum pressures easily. To do
this, valves are free of virtual leaks, they have the lowest particulate levels, greatly
reduced surface areas, less parts exposed to vacuum, have a smaller number
of bearings exposed to vacuum, are smaller in size, weigh less, and are fully welded.
Thermionics valves are welded internally or with full penetration, eliminating
the problems inherent with brazed assemblies, and further reducing
the internal surface area and profile.
- The outgassing rate of the materials
from which the valve is manufactured must be
considered. Materials affect the gas load,
and thereby the pump size required. If a valve is to be used in a corrosive
environment, the appropriate material must be specified when the order is placed.
- The smaller the seat or gate conductance leakage,
the smaller the pump required. High leak rates make
additional pump speed necessary to compensate for leakage through the seal. A valve is
often sealed against atmosphere when equipment is shut down for the night
or weekends; the leak rate must be small to prevent wasting pumping capacity.
- Consider the number of cycles for
which the valve is guaranteed and if
the number is independently verifiable. Is the valve stem seal O-ring or bellows
sealed? If bellows sealed, is a welded or formed bellows used? Viton-sealed gate
and poppet valves are very forgiving, whereas metal-sealed bakeable valves must
be manufactured with greater precision and they are more sensitive to contamination.
- Determine whether the chamber pressure requirements for your
particular needs are met by your proposed system by comparing the gas load at
designed base pressure with pumping speed as reduced by any conductance
restrictions between pump and chamber. First, the outgassing load Q is simply the product
of the outgassing rate(s) of the material or materials used in the system and
the respective area or areas.
Then, calculate the chamber pumping
speed required to maintain the pressure necessary for your vacuum process,
S = Q/P
where
S = Pumping speed in the
chamber (l/sec)
Q = Chamber outgassing as
calculated above (Torr l/sec)
P = Pressure in the chamber (Torr)
- If S appears excessively high, consider:
- Changing the chamber size or
configuration to decrease surface area.
- Changing to a construction material with a lower outgassing rate.
- Reducing the outgassing rate by baking the chamber or by
special passivation, such as the TLI passivation process.
- The delivered pumping speed, Sd (pump speed at the chamber port), is limited
by component conductance between the pump and the port. Conductance, in
turn, is a function of tube size, length and amount the poppet or gate opens.
The higher the chamber speed needed, the larger the valve size needed, and
the greater the need for full conductance. Usually the conductance of high
vacuum valves should be greater than the rated pump speed.
- Finalize the chamber design and determine how you will connect the valve
and other component parts to the chamber system, keeping in mind how each
component will affect conductance and associated gas flow pattern.
- After selecting your chamber, pump, valves, and plumbing, calculate
the pumping speed delivered to the
chamber as follows:
1/Sd = 1/S + 1/C1 +
1/C2 +
1/C3 + ... + 1/Cn +
1/Cv
where 1/Sd = Pumping speed delivered
to the chamber
1/S = Pump speed
C1 to Cn = Conductance of the components 1 to n between
the pump and the
chamber
Cv = Valve conductance
- Compare the delivered chamber speed
(Sd) to the required chamber speed S as calculated in step 7.
- If the delivered speed is less than your required chamber speed, then consider:
- The alternatives in 7A above;
- Shortening the distance between pump and chamber;
- Increasing the pipe and valve size between pump and chamber;
- Increasing the pump speed.
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