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Hanks HM2 Single Crucible e-Guns

Hanks HM2 Single Crucible e-Guns

This electron beam evaporation source has a patented modular magnet design. Reliable and simple to operate, it is equally suited for research or production applications producing uniform, high purity films and optical coatings. Available from 6 kW to 15 kW, it is 33% smaller than traditional evaporation sources, yet provides the same crucible volume, evaporation rate, and power capability of physically larger guns.

UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.


Specifications

Maximum Power 6 kW 10 kW 15 kW 
Crucible volume 7/10 cc 10/15/40 cc 40/75/100 cc
Emission voltage 7.5 kV 10 kV 10 kV
Emission current 0 to 800 mA 0 to 1.0 A 0 to 1.5 A
Filament 700 W700 W700 W
E-beam deflection 220° 220° 220°
Beam spot size  .25" diameter .25" diameter .25" diameter
Evaporation rate 
(for aluminum)
  1 gm/min at 10 kW
3.6 microns at 25 cm
1.5 gm/min at 15 kW
50,000 Å min
X and Y sweep Hyper-Unimelt Sweep (0-200 Hz) Hyper-Unimelt sweep (0-200 Hz) Hyper-Unimelt sweep (0-200 Hz)
Water 3.0 gpm, 50 psi, 3/8" dia. tube 3.0 gpm, 50 psi, 3/8" dia. tube 3.0 gpm, 50 psi, 3/8" dia. tube
Crucible material OFE copper  OFE copper  OFE copper 
Bakeout temp 230°C (446°F) 230°C (446°F) 230°C (446°F)
e-Gun size 4.50" x 3.25" x 2.50" 4.50" x 3.25" x 2.50" 5.00" x 3.50" x 2.50"
Weight 5 lbs. 5 lbs. 7 lbs.

Mounting Configurations

Each e-Gun is available in three standard mounting configurations:
  1. e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
  2. e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
  3. e-Gun alone with no mounting flange

Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.

Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.

Base Schematic

Ordering Information

 Model Number Power Crucible Volume Price
Single Crucible Models 0607 6kW 7 cc $4,565.
0610 6kW 10 cc $4,565.
1010 10kW 10 cc $4,565.
1015 10kW 15 cc $4,565.
1540 15kW 40 cc $5,500.
1575 15kW 75 cc $6,750.
15100 15kW 100 cc $6,750.
Twin—Two Single Crucible Models D1010 10 kW 10 cc $11,650.*
D1015 10 kW 15 cc $11,650.*
D1540 15 kW 40 cc $14,120.*
*Please Note: These prices are estimates provided for budgetary purposes. Actual prices may be lower or higher, and are dependent upon mounting configurations, system geometry, and utility requirements. Please contact the factory for further information.


Hanks HM2 e-Guns are manufactured and protected under one or more of the following patents:

Patent No. 4,835,789
Patent No. 4,891,821
Patent No. 4,947,404

For further information also see:
Power Supplies
Controllers and PSC-600 controller
Accessories
Crucible Liners



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