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Hanks HM2 Single Crucible e-Guns
Hanks HM2 Single Crucible e-Guns

This electron beam evaporation source has a patented modular magnet design. Reliable and simple to operate, it is equally suited for research or production applications producing uniform, high purity films and optical coatings. Available from 6 kW to 15 kW, it is 33% smaller than traditional evaporation sources, yet provides the same crucible volume, evaporation rate, and power capability of physically larger guns.
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10 -11 Torr.
Specifications
| Maximum Power |
6 kW
|
10 kW |
15 kW |
| Crucible
volume |
7/10 cc |
10/15/40 cc |
40/75/100 cc |
| Emission voltage |
7.5 kV |
10 kV |
10 kV |
| Emission current |
0 to 800 mA |
0 to 1.0 A |
0 to 1.5 A |
| Filament |
700 W | 700 W | 700 W |
| E-beam deflection |
220°
| 220°
| 220°
|
| Beam spot size |
.25" diameter |
.25" diameter |
.25" diameter |
Evaporation
rate
(for aluminum) |
|
1
gm/min at 10 kW
3.6 microns at 25 cm |
1.5
gm/min at 15 kW
50,000 Å min |
| X and Y sweep |
Hyper-Unimelt Sweep (0-200 Hz) |
Hyper-Unimelt sweep (0-200 Hz) |
Hyper-Unimelt sweep (0-200 Hz) |
| Water |
3.0 gpm, 50 psi, 3/8" dia. tube |
3.0 gpm, 50 psi, 3/8" dia. tube |
3.0 gpm, 50 psi, 3/8" dia. tube |
| Crucible material |
OFE copper |
OFE copper |
OFE copper |
| Bakeout temp |
230°C
(446°F) |
230°C
(446°F) |
230°C
(446°F) |
| e-Gun size |
4.50" x 3.25" x 2.50"
|
4.50" x 3.25" x 2.50"
|
5.00" x 3.50" x 2.50"
|
| Weight |
5 lbs. |
5 lbs. |
7 lbs. |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Base Schematic
Ordering Information
| | Model
Number | Power | Crucible Volume | Price |
| Single Crucible Models |
0607 | 6kW | 7 cc | $4,565. |
| 0610 | 6kW | 10 cc | $4,565. |
| 1010 | 10kW | 10 cc | $4,565. |
| 1015 | 10kW | 15 cc | $4,565. |
| 1540 | 15kW | 40 cc | $5,500. |
| 1575 | 15kW | 75 cc | $6,750. |
| 15100 | 15kW | 100 cc | $6,750. |
| Twin—Two Single Crucible Models |
D1010 | 10 kW | 10 cc | $11,650.* |
| D1015 | 10 kW | 15 cc | $11,650.* |
| D1540 | 15 kW | 40 cc | $14,120.* |
| *Please Note: These prices are estimates provided for budgetary purposes. Actual prices may be lower or higher, and are dependent upon mounting configurations, system geometry, and utility requirements. Please contact the factory for further information.
|
Hanks HM2 e-Guns are manufactured and protected under one or more of the following patents:
Patent No. 4,835,789
Patent No. 4,891,821
Patent No. 4,947,404
For further information also see:
Power Supplies
Controllers and PSC-600 controller
Accessories
Crucible Liners
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