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Hanks HM2 Multiple Crucible Rotary e-Gun™
Hanks HM2 Multiple Crucible Rotary e-Gun
Modular Magnets
The unique modular magnet concept is incorporated in the multiple crucible rotary Hanks HM2 e-Gun design. This concept makes possible a very compact unit. All of the Hanks HM2 unique features are incorporated in this model.
Hyper-Unimelt Sweep Controller
(Optimum control on Low or High Rates)
High frequency sweep (0-200 Hz) provides the user with total flexibility in the operation of the e-Gun. By a twist of the knobs on the X-Y sweep controller, the beam can be varied in size to suit the material being evaporated. This is very beneficial for optical coatings and other materials, where beam size plays an important role in optimum control from 1-2Å to very high deposition rates.
High Vacuum Compatible
Metal and elastomer seals, measured base pressure: 2 x 10-9 Torr.
Specifications
| Maximum Power |
6 kW
|
10 kW |
| Crucible
volume |
7/10/15 cc |
10/15/25 cc |
| Emission voltage |
7.5 kV |
10 kV |
| Emission current |
0 to 800 mA |
0 to 1.0 A |
| Filament |
700 W | 700 W |
| E-beam deflection |
220°
| 220°
|
| Beam spot size |
.25" diameter |
.25" diameter |
Evaporation
rate
(for aluminum) |
|
1
gm/min at 10 kW
3.6 microns at 25 cm |
| X and Y sweep |
Hyper-Unimelt Sweep (0-200 Hz) |
Hyper-Unimelt sweep (0-200 Hz) |
| Water |
3.0 gpm, 50 psi, 3/8" dia. tube |
3.0 gpm, 50 psi, 3/8" dia. tube |
| Crucible material |
OFE copper |
OFE copper |
| Bakeout temp |
120°C
(250°F) |
120°C
(250°F) |
| e-Gun size |
7.5" x 6.0" x 3.75"
|
7.5" x 6.0" x 3.75"
|
| Weight |
22 lbs. |
22 lbs. |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Ordering Information
| Model
Number* | Power | Crucible No. | Crucible Volume | Price |
| R0607-4 | 6kW | 4 | 7 cc | $8,500. |
| R0610-4 | 6kW | 4 | 10 cc | $8,500. |
| R0615-4 | 6kW | 4 | 15 cc | $8,500. |
| R1010-4 | 10kW | 4 | 10 cc | $8,500. |
| R1015-4 | 10kW | 4 | 15 cc | $8,500. |
| R1025-4 | 10kW | 4 | 25 cc | $8,500 |
| *Not all models appear in this pricing grid, please consult factory. |
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