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Hanks HM2 Hydra e-Gun™
Hanks HM2 Hydra e-Gun

The Hydra design consists of a compact array of crucibles and electron emitters which translate linearly with respect to each other to provide for the co-deposition of up to six different materials simultaneously. By the efficient utilization of space, four different combinations of six crucibles or up to forty-two permutations of two-metal combinations are available for co-deposition in a single vacuum pumpdown.
Innovative technology and a creative approach to magnetic field concepts has been fostered by Thermionics to result in several new, unique electron emission configurations. The Hydra configuration eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.
Co-Evaporation Technology:
Single Array—5 crucibles, 1-3 emitters
Dual Array—10 crucibles, 2-6 emitters
Specifications
| Maximum Power |
10 kW
|
15 kW |
| Crucible
volume |
10/15 cc |
40 cc |
| Emission voltage |
10 kV |
10 kV |
| Emission current |
0 to 1.0 A |
0 to 1.5 A |
| Filament |
700 W | 700 W |
| E-beam deflection |
220°
| 220°
|
| Beam spot size |
.25" diameter |
.25" diameter |
Evaporation
rate
(for aluminum) |
1
gm/min at 10 kW
3.6 microns at 25 cm |
1.5
gm/min at 15 kW
50,000 Å min |
| X and Y sweep |
Hyper-Unimelt Sweep (0-200 Hz) |
Hyper-Unimelt sweep (0-200 Hz) |
| Water |
3.0 gpm/crucible, common return (up to 30 gpm) |
3.0 gpm/crucible, common return (up to 30 gpm) |
| Crucible material |
OFE copper |
OFE copper |
| Bakeout temp |
230°C
(446°F) |
230°C
(446°F) |
| e-Gun size--single array |
6.25" x 5.5" x 15"
|
6.25" x 5.75" x 15"
|
| e-Gun size--double array |
6.25" x 11" x 15"
|
6.25" x 11.5" x 15"
|
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Ordering Information
Prices are dependent upon many factors, for example system, mounting flange, and e-Gun configurations, and geometries. Our engineering group will work closely with you to determine your requirements, then a firm quotation can be given.
Hanks HM2 e-Guns are manufactured and protected under one or more of the following patents:
Patent No. 4,835,789
Patent No. 4,891,821
Patent No. 4,947,404
For further information also see:
Power Supplies
Controllers and PSC-600 controller
Accessories
Crucible Liners
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