Thermionics Vacuum Products 1-800-962-2310
sales@thermionics.com
Office Hours: 8am to 5pm PST
May 2008


How can we help you?

Pumps

Valves

Flanges, Fittings and Hardware

Motion Feedthroughs

Sample Handling

Thin Film Deposition

Pressure Measurement

Chambers and Accessories

Helium Leak Detectors

Custom Systems

Web Specials


Request a Catalog

Jobs at Thermionics




Our online catalog is being updated! Please contact us for current pricing.

Hanks HM2 Hydra e-Gun™

Hanks HM2 Hydra e-Gun

Click for a larger image of the Hanks HM2 Hydra e-Gun The Hydra design consists of a compact array of crucibles and electron emitters which translate linearly with respect to each other to provide for the co-deposition of up to six different materials simultaneously. By the efficient utilization of space, four different combinations of six crucibles or up to forty-two permutations of two-metal combinations are available for co-deposition in a single vacuum pumpdown.

Innovative technology and a creative approach to magnetic field concepts has been fostered by Thermionics to result in several new, unique electron emission configurations. The Hydra configuration eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.

Co-Evaporation Technology:

  • Single Array—5 crucibles, 1-3 emitters
  • Dual Array—10 crucibles, 2-6 emitters

  • Specifications

    Maximum Power 10 kW 15 kW
    Crucible volume 10/15 cc 40 cc
    Emission voltage 10 kV 10 kV
    Emission current 0 to 1.0 A 0 to 1.5 A
    Filament 700 W700 W
    E-beam deflection 220° 220°
    Beam spot size  .25" diameter .25" diameter
    Evaporation rate 
    (for aluminum)
    1 gm/min at 10 kW
    3.6 microns at 25 cm
    1.5 gm/min at 15 kW
    50,000 Å min
    X and Y sweep Hyper-Unimelt Sweep (0-200 Hz) Hyper-Unimelt sweep (0-200 Hz)
    Water 3.0 gpm/crucible,
    common return (up to 30 gpm)
    3.0 gpm/crucible,
    common return (up to 30 gpm)
    Crucible material OFE copper  OFE copper 
    Bakeout temp 230°C (446°F) 230°C (446°F)
    e-Gun size--single array 6.25" x 5.5" x 15" 6.25" x 5.75" x 15"
    e-Gun size--double array 6.25" x 11" x 15" 6.25" x 11.5" x 15"

    Mounting Configurations

    Each e-Gun is available in three standard mounting configurations:
    1. e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
    2. e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
    3. e-Gun alone with no mounting flange

    Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.

    Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.

    Ordering Information

    Prices are dependent upon many factors, for example system, mounting flange, and e-Gun configurations, and geometries. Our engineering group will work closely with you to determine your requirements, then a firm quotation can be given.

    Hanks HM2 e-Guns are manufactured and protected under one or more of the following patents:

    Patent No. 4,835,789
    Patent No. 4,891,821
    Patent No. 4,947,404

    For further information also see:
    Power Supplies
    Controllers and PSC-600 controller
    Accessories
    Crucible Liners



    Copyright (C) 2008 TLI Enterprises and its Subsidiaries. All Rights Reserved.

    By accessing and using this Web Site you agree to be bound by the Terms and Conditions of Use. We respect your privacy.


    Some content, including important notices and agreements, may be in Adobe Acrobat (PDF) format.
    Download Adobe Acrobat Reader for Free (new window)