Thermionics Vacuum Products 1-800-962-2310
sales@thermionics.com
Office Hours: 8am to 5pm PST
May 2008


How can we help you?

Pumps

Valves

Flanges, Fittings and Hardware

Motion Feedthroughs

Sample Handling

Thin Film Deposition

Pressure Measurement

Chambers and Accessories

Helium Leak Detectors

Custom Systems

Web Specials


Request a Catalog

Jobs at Thermionics




Our online catalog is being updated! Please contact us for current pricing.

High Capacity Multiple Crucible Linear e-Guns

High Capacity Multiple Crucible Linear e-Guns

The HC Series Linear e-Gun is an all metal-sealed e-Gun. Available in 4 and 5 crucible versions, the source allows sequential deposition of up to 5 materials. Standard mounting is on a 12" O.D. Conflat-type flange and includes auto indexer and all mechanical and electrical connections.

UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.

270° Beam Deflection
The filament is completely hidden to ensure maximum protection from shorting caused by stray particles.

Easy Filament Replacement
A filament alignment tool maintains critical filament tolerances during emitter assembly allowing quick and accurate filament replacement.

Permanent Magnet Beam Positioning
The primary beam position is controlled by a permanent magnet; electromagnets are used only for precise positioning and beam sweep.



Features
• 4- and 5-crucible models
• 12" O.D. CF mounting flange
• Includes all electrical and utility feedthroughs

Specifications

Maximum power 10 kW
Emission voltage -6 to -10 kV
Emission current 0 to 1 A
Filament700W
E-beam deflection 270°
Beam spot size Approx. .25" dia. tight beam
Evaporation rate 1 gram/min @ 10 kW, 36,000 Å/min Al @ 10" (250 mm) source to substrate distance
Water 3 gpm, 25 psi pressure differential
Crucible material OFE copper
Bakeout temperature 230°C

Mounting Configurations

Each e-Gun is available in three standard mounting configurations:
  1. e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
  2. e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
  3. e-Gun alone with no mounting flange

Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.

Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.

Ordering Information

HC Series Linear e-Guns
PowerCrucible Size (cm3)No. of CruciblesModel No.Price
6 kW 7 4 HCL0607-4 $19,430
7 5 HCL0607-5 $21,430
15 4 HCL0615-4 $19,430
15 5 HCL0615-5 $21,430
25 4 HCL0625-4 $19,430
10 kW 40 4 HCL1040-4 $19,430
40 5 HCL1040-5 $21,430
15 kW 75 4 HCL1575-4 $19,430
75 5 HCL1575-5 $19,430

Option: Emitter Assembles
Model No.DescriptionPrice
112128-SD Standard $1,000
112128-HD Heavy-duty $1,200
112128-DE Dual filament $1,400
     
Option: Spare Parts Kit
Model No.DescriptionPrice
HC/ERK-SD Standard $95
HC/ERK-HD Heavy-duty $95
HC/ERK-DE Dual filament $105
     

For further information also see:
Power Supplies
Controllers
Accessories
Crucible Liners


Copyright (C) 2008 TLI Enterprises and its Subsidiaries. All Rights Reserved.

By accessing and using this Web Site you agree to be bound by the Terms and Conditions of Use. We respect your privacy.


Some content, including important notices and agreements, may be in Adobe Acrobat (PDF) format.
Download Adobe Acrobat Reader for Free (new window)