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Evaporation Table

Evaporation Table

The information in the tables has been compiled from a number of sources, some of which may be out of date. Should you find an error or be able to add new information, please contact us.

Name Symbol Melting Point °C Density gm/cm3 Temperature (°C) at Vap. Press. Evaporation Techniques Remarks
10-8 Torr 10-6 Torr 10-4 Torr Electron Beam Crucible Coil Boat Basket
Aluminum
Al
660
2.7
677
812
1010
Xlnt.
ZrB2, BN Vit. Carbon
W
TiB2, BN, Al2O3
W
Alloys and wets, Tungsten-stranded
Aluminum Carbide Al4C3 1400 2.4     ~800 Fair          
Aluminum Fluoride AIF
AIF3
Subl. 2.9 410
Sublimes
490
Sublimes
700
Sublimes
Poor   W
Ta
    Loses Fluorine. Disproportionates.
Aluminum Nitride AIN Subl. 3.3     ~1750 Fair         Decomposes.
Alumina(a) Al2O3 2020 4.0 1045 1210 1325 Xlnt. W W W W Sapphire Xlnt. in EB. Chemically deposit. Index may change.
Antimony Sb 630 6.7 279 345 425 Poor Al2O3 Mo
Ta
Mo, Ta,
Al2O3
Coated
Mo
Ta
 
Antimony Trioxide Sb203 656 5.2     ~300 Good Al2O3   Pt
Al2O3
Coated
Pt Toxic
Antimony Trisulphide Sb2S3 550 4.6     ~200       Mo
Ta
Mo
Ta
 
Arsenic As 814 5.7 107
Sublimes
150
Sublimes
210
Sublimes
Poor Al2O3
BeO
Vit. Carbon
  C   Sublimes rapidly at low temperature, toxic.
Arsenic Selenide As2Se3 360 4.5         Quartz        
Barium Ba 725 3.5 545 627 735 Fair   W W
Ta
Mo
W Wet without alloying. Reacts with ceramics.
Barium Fluoride BaF2 1280 4.9     ~700            
Barium Oxide BaO 1923 5.7     ~1200 Poor     Pt Pt  
Barium Titanate BaTiO3 Dec. 6.0 Decomposes Decomposes Decomposes           Decomposes. Yields free Ba from Titanate single source—evaporate from two sources, flash from superheated W.
Beryllium Be 1278 1.9 710 878 1000 Xlnt. BeO
C
Vit. Carbon
W W
Ta
Mo
W Wets W/Mo/Ta. Oxides are toxic.
Beryllium Fluoride BeF2 Subl. 2.0     ~200 Good         Toxic
Beryllium Oxide BeO 2530 3.0    ~1900 Good         W Powders are toxic.
Bismuth Bi 271 9.8 330 410 520 Good Al2O3
Vit. Carbon
W W
Mo
Al2O3
Ta
W Vapors are toxic. High resistivity. No shorting of baskets.
Bismuth Fluoride BiF3 727 5.3                  
Bismuth Oxide Bi2O3 820 8.9     ~1400 Poor       Pt Vapors are toxic.
Bismuth Selenide Bi2Se3 710 6.8       Good Quartz        
Bismuth Telluride Bi2Te3 585 7.9         Quartz   W
Mo
   
Bismuth Titanate BiTi2O7     Decomposes Decomposes Decomposes           Decomposes, evaporate from two sources.
Bismuth Trisulphide Bi2S3 685 7.5                  


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