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3kW Multiple Crucible Linear e-Gun
3kW Multiple Crucible Linear e-Gun
 Click for a larger image (opens in a new window)
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11
Torr.
Specials
All multiple position e-guns can be mounted on larger diameter ConFlat®
or rectangular PyraFlat flanges, single or back-to-back.
Operation
The operating principle of the multiple crucible e-Gun is identical to
the single crucible source with the following advantages:
- Large supply of evaporantWhen every crucible is filled with
the same source material, an increased volume of evaporant can be evaporated
in a single vacuum cycle.
- Deposition of up to five different materials in one vacuum cycleA
different material can be put in each crucible and deposited in any
sequence during a single vacuum cycle. The deposition rates are the
same as those of the single crucible model. Only one crucible is heated
at a time. The single filament remains stationary and the crucible head
is indexed into position by the drive handle. Therefore, the evaporation
always originates from exactly the same position in the vacuum chamber.
The inactive crucibles are shielded from the heated crucibles by the
magnetic pole pieces, thereby eliminating contamination between crucibles.
Specifications
| Operating Pressure |
Below 5 x 10-5
Torr is desirable for best operation |
| Beam voltage |
4,000 V |
| Beam current |
0-750 mA
continuously variable |
| Maximum power |
3,000 W |
| Cooling water |
1/2 gpm |
Maximum bakeout
temperature |
230°C (446°F) |
Feedthrough
requirements |
Two 7 kV 50
A |
| Crucible volume |
2.24 cc |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Base Schematic
Three crucible 3 kW e-Gun source, model 100-0030
Ordering Information
For further information also see:
Power Supplies
Controllers
Accessories
Crucible Liners
PyraFlat flanges are manufactured and
protected under one or more of the following patents:
5,640,751; 4,685,193
Standard Models
| Model No. | Crucibles | Price |
| 100-0030 | 3 | $6,850 |
| 100-0040 | 4 | $7,350 |
| 100-0050 | 5 | $7,850 |
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