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May 2008


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3kW Multiple Crucible Linear e-Gun

3kW Multiple Crucible Linear e-Gun


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UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.

Specials
All multiple position e-guns can be mounted on larger diameter ConFlat® or rectangular PyraFlat flanges, single or back-to-back.

Operation
The operating principle of the multiple crucible e-Gun is identical to the single crucible source with the following advantages:

  • Large supply of evaporant—When every crucible is filled with the same source material, an increased volume of evaporant can be evaporated in a single vacuum cycle.
  • Deposition of up to five different materials in one vacuum cycle—A different material can be put in each crucible and deposited in any sequence during a single vacuum cycle. The deposition rates are the same as those of the single crucible model. Only one crucible is heated at a time. The single filament remains stationary and the crucible head is indexed into position by the drive handle. Therefore, the evaporation always originates from exactly the same position in the vacuum chamber. The inactive crucibles are shielded from the heated crucibles by the magnetic pole pieces, thereby eliminating contamination between crucibles.

Specifications

Operating Pressure Below 5 x 10-5 Torr is desirable for best operation
Beam voltage 4,000 V
Beam current 0-750 mA
continuously variable
Maximum power 3,000 W
Cooling water 1/2 gpm
Maximum bakeout
temperature
230°C (446°F)
Feedthrough
requirements
Two 7 kV 50 A
Crucible volume 2.24 cc

Mounting Configurations

Each e-Gun is available in three standard mounting configurations:
  1. e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
  2. e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
  3. e-Gun alone with no mounting flange

Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.

Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.

Base Schematic


Three crucible 3 kW e-Gun source, model 100-0030

Ordering Information

For further information also see:
Power Supplies
Controllers
Accessories
Crucible Liners

PyraFlat flanges are manufactured and protected under one or more of the following patents: 5,640,751; 4,685,193

Standard Models
Model No. Crucibles Price
100-0030 3 $6,850
100-0040 4 $7,350
100-0050 5 $7,850


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