Our online catalog is being updated! Please contact us for current pricing. MicroPositioning Stages Introducing a new line of in-vacuum positioning stages with sub-micron resolution and vibration-free motion. This new line of manipulation provides accurate positioning for SEM, TEM, PEEM and other high-resolution applications. Thermionics offers several configurations of the MicroPositioning stage. Here are three examples: • Three-axis • Five-axis • Custom four-axis Contact an Applications Engineer to discuss your specific requirements. Up to 6 axes of linear and/or rotary motion are produced by combining precise positioning stages activated by compact piezoelectric motors. These non-magnetic in-vacuum motors are UHV compatible down to 10-10 Torr. The stages may also be integrated with conventional out-of-vacuum motion devices. The linear encoder scale is attached directly to the moving stage eliminating all drive train induced translation errors. Features 0.1 µm design resolution 0.2 µm minimum incremental motion Velocity up to 250 mm/s Unlimited travel Up to 6 axes of motion Bakeable to 120°C Vibration-free motion Integrated motion controller 1-year guarantee Options Reduced magnetic permeability Non-magnetic titanium stage construction In-vacuum sample transfer Hand-held terminal for controller Applications PEEM, SEM, SIMS, TEM Microscopy Thin film deposition Surface treatment E-beam and ion beam applications Example Configurations Three-axis Micropositioning Stage [back to top] Manipulator Axes (resolution) X motion ±0.25" (≤ 1.0 µm) Y motion ±0.50" (≤ 1.0 µm) Z motion ±0.25" (≤ 1.0 µm) Sample Characteristics Sample Size 1 cm x 1 cm Bakeout Temperature 120°C Reduced Magnetic Permeability < 0.1 Gauss within 1.25" of sample Motorization Non-magnetic, in-vacuum piezo-electric motors with encoders. The integrated package includes a computer programmable motion controller for all five axes. Computer Interface: RS-232/485 or ethernet Five-axis Micropositioning Stage [back to top] Manipulator Axes (resolution) X motion ±0.5" (≤ 1.0 µm) Y motion 3.0" (≤ 1.0 µm) Z motion ±0.3" (≤ 1.0 µm) Sample polar rotation +5°, -95° (≤ 0.01°) Sample flip ±5° (≤ 0.01°) Sample Characteristics Sample Size 1 cm x 1 cm Bakeout Temperature 120°C Motorization Non-magnetic, in-vacuum piezo-electric motors with encoders. The integrated package includes a computer programmable motion controller for all three axes. Computer Interface RS-232/485 or ethernet Custom Four-axis Micropositioning Stage [back to top] Manipulator Axes (resolution) X motion 3.0" (≤ 1.0 µm) at 8 mm/sec Y motion 3.0" (≤ 1.0 µm) Polar rotation ±180° (≤ 0.01°) Flip ±5°, -95° (≤ 0.1°) Sample Characteristics Sample Size 2" dia. Bakeout Temperature 120°C Motorization X and Y motion: Non-magnetic, in-vacuum piezo-electric motors with encoders Polar and Flip: Standard out-of-vacuum stepper motors. The integrated package includes a computer programmable motion controller for all four axes. Computer Interface RS-232/485 or ethernet