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PLD Components
PLD substrate manipulator with 2" quartz lamp heater and gas shower ring.
Thermionics offers an extensive line of substrate and target manipulators as well as load lock and sample
transfer systems for PLD systems. Our standard modular components can be configured in a variety of ways to
meet your specific PLD system design. We can also design, integrate and certify complete PLD systems.
We show a typical PLD system and examples of various other configurations on this page.
Contact for more information.
Typical Manipulator Specifications
| Orientation | Vertical or Horizontal |
| X-Y movement | ±0.5" or ±1.0" |
| Substrate sample | size <2" diameter |
| Targets | 6 - 1" (other configurations available) |
| Sample orientation | any |
| Sample heating | SHQ to 700°C (water-cooled heater) |
| Vacuum environment | UHV, O2 |
| In-vacuum sample transfer | optional |
| Base flange | 8" |
Typical PLD Configuration and Variations
We display some examples of PLD systems. Please contact us with your specific requirements for a customized quote.
Example 1. Typical PLD Configuration
The substrate and target are introduced through a load lock chamber opposite the target gearbox. The substrate is then rotated on its polar axis to face the target gearbox. The substrate can be moved out of the way for transfer of the targets. This is one of the most common and economical configurations.
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Example 2. Vertical PLD Configuration
This design features up-facing, gravity-held target holders to
accommodate liquid, powder, or conventional targets. A custom transfer fork
moves substrates and targets into place via standard load lock chamber.
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Example 3. Simple PLD Configuration
This design offers basic substrate and target devices with no XY or Z adjustment.
Substrate and target changes are done at atmosphere.
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Example 4. Multi-Purpose PLD Configuration
This design permits MBE growth, via bottom-flange-mounted
evaporation sources, as well as PLD growth. Substrate assembly faces the side of
the chamber for PLD, the bottom for MBE, and the other side for in-vacuum transfer
of substrates.
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Ordering Information
Prices vary. Contact for other design details and for a customized quotation.
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