Our online catalog is being updated! Please contact us for current pricing. PLD Components Shutter Actuation Rotary Feedthroughs, FRMC, FRM Series PLD substrate manipulator with 2" quartz lamp heater and gas shower ring. Thermionics offers an extensive line of substrate and target manipulators as well as load lock and sample transfer systems for PLD systems. Our standard modular components can be configured in a variety of ways to meet your specific PLD system design. We can also design, integrate and certify complete PLD systems. We show a typical PLD system and examples of various other configurations on this page. Consult factory for more information. Typical Manipulator Specifications Orientation Vertical or Horizontal X-Y movement ±0.5" or ±1.0" Substrate sample size <2" diameter Targets 6 - 1" (other configurations available) Sample orientation any Sample heating SHQ to 700°C (water-cooled heater) Vacuum environment UHV, O2 In-vacuum sample transfer optional Base flange 8" Typical PLD Configuration and Variations We display some examples of PLD systems. Please contact us with your specific requirements for a customized quote. Example 1. Typical PLD Configuration The substrate and target are introduced through a load lock chamber opposite the target gearbox. The substrate is then rotated on its polar axis to face the target gearbox. The substrate can be moved out of the way for transfer of the targets. This is one of the most common and economical configurations. View images and larger schematic Example 2. Vertical PLD Configuration This design features up-facing, gravity-held target holders to accommodate liquid, powder, or conventional targets. A custom transfer fork moves substrates and targets into place via standard load lock chamber. View images and larger schematic Example 3. Simple PLD Configuration This design offers basic substrate and target devices with no XY or Z adjustment. Substrate and target changes are done at atmosphere. View larger schematic Example 4. Multi-Purpose PLD Configuration This design permits MBE growth, via bottom-flange-mounted evaporation sources, as well as PLD growth. Substrate assembly faces the side of the chamber for PLD, the bottom for MBE, and the other side for in-vacuum transfer of substrates. View larger schematics Ordering Information Prices vary. Consult factory for other design details and for a customized quotation.