Thermionics Vacuum Products 1-800-962-2310
sales@thermionics.com
Office Hours: 8am to 5pm PST
July 2008


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Our online catalog is being updated! Please contact us for current pricing.

PLD Components Vertical Configuration


This page shows an illustration of a "vertical configuration" of Thermionics' PLD system. Additional information and descriptions of other PLD configurations.

Vertical Configuration

This design features up-facing, gravity-held target holders to accommodate liquid, powder, or conventional targets. A custom transfer fork moves substrates and targets into place via standard load lock chamber.


Vertically-mounted target and substrate

Gravity-held targets

Custom transfer fork

Substrate holder with SHQ heater and gas shower ring



PLD substrate manipulator with 2" quartz lamp heater and gas shower ring



PLD target manipulator, for inverted mount, gravity-held target holder



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