This page shows an illustration of a "typical configuration" of Thermionics' PLD system.
Additional information and descriptions of other PLD configurations.
Typical Configuration
The substrate and target are introduced through a loadlock chamber opposite the target gearbox. The substrate is then rotated on its polar axis to face the target gearbox. The substrate can be moved out of the way for transfer of the targets. This is one of the most common and economical configurations.
Typical PLD configuration, vertically-mounted substrate manipulator
Typical PLD substrate manipulator with 2" quartz lamp heater
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Typical PLD target manipulator, horizontal mount, STLC target system
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Substrate rotates about stationary heater assembly
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Targets (shield removed)
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