This page shows an illustration of a "multi-purpose configuration" of Thermionics' PLD system.
Additional information and descriptions of other PLD configurations.
Multi-purpose Configuration
This design permits MBE growth, via bottom-flange-mounted
evaporation sources, as well as PLD growth. Substrate assembly faces the side of
the chamber for PLD, the bottom for MBE, and the other side for in-vacuum transfer
of substrates.
PLD configuration with horizontally-mounted substrate and flange mount for k-cells and/or e-Guns