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May 2008


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Magnetically-Coupled Drive Rotary Feedthroughs FRMRE Series


Magnetically-Coupled Drive Rotary Feedthroughs, FRMRE Series

Description

The rare earth magnetic series single and dual rotary drives are designed to provide exceptional, long life performance. They are UHV compatible and are an excellent option to conventional bellows-sealed and other rotary devices. They can be adapted to PLD target clocking and continuous rotation of targets and substrates, as well as applications which require small profiles and high performance.

There are no sliding seals or magnets in vacuum and stray magnetic fields are virtually nonexistent. The in-vacuum armature is made of paramagnetic materials with stainless steel and silicon nitride bearings and is capable of repeated bake-out to 200°C (with magnets removed). Out-of-vacuum bearings are accessible for lubrication and the magnet drive is easily removable.


Single Rotary Axis Feedthrough, FRMRE-275-38/SCC
(shown with optional /SCC motor drive)


Dual Axis Rotary Feedthrough, FRRMRE-275-75/38/SCC
(model shown here with manually operated outer shaft and
optional /SCC motor driven inner shaft)


Base Schematics

Magnetically-Coupled Rotary Feedthrough
FRMRE-275-38
  • 3/8" rotating probe
  • 2.75" O.D. mounting flange
  • Manual drive knob with position lock
  • 4,000,000 revolutions before internal bearing service
  • Maximum bakeout temperature: 200°C (magnetic drive removed)
  • Mechanical torque limit: 150 oz/in
  • Maximum speed: 500 rpm
  • Removable neodynium iron boron magnetic drive for bake-out


FRMRE-275-38 single axis rotary magnetic drive


Dual Rotary Magnetically-Coupled Feedthrough
FRRMRE-275-75/38
Ideal for PLD target gearboxes
  • 3/4" and 3/8" rotating shafts
  • 2.75" O.D. mounting flange
  • One or both rotary shafts can be motorized (see options below)
  • Manual adjustment of 3/4" diameter shaft with position lock
  • 4,000,000 revolutions before internal bearing service
  • Maximum bakeout temperature: 200°C (magnetic drive removed)
  • Mechanical torque limit: 150 oz/in
  • Removable neodynium iron boron magnetic drive for bake-out


FRRMRE-275-75/38/SCC (shown with optional /SCC
speed control motor drive on 0.38" shaft)

Ordering Information

Magnetically Coupled Single and Dual Rotary Feedthroughs
Drive Type Model No. Base Price Motorization Options*
/MS /MY /SCC**
Single rotary drive FRMRE-275-38 $1,575 $685 $685 $1,005
Dual rotary drive FRRMRE-275-75/38 $2,875 $685 $685 $1,005
*Add motorization option price to base price.
**Price includes controller. Other motorizations options do not include controller.

Options

Motorization Options
/MS Stepper Motor Drive
Model Number: /MS Price: add $685
Applications: precise positioning, positioning multiple axes at one time, computer-controlled actuation
  • 200 steps per revolution
  • 50 oz-in holding torque (higher torque motors available)
  • Maximum speed 300 rpm
  • Low inertia design
  • Manual knob
  • Motor controller sold separately

/MY Synchronous Motor Drive
Model Number: /MY Price: add $685
Applications: coarse positioning, continuous rotation
  • Single speed, 72 rpm
  • 2 directions
  • 50 oz-in holding torque (higher torque motors available)
  • Low inertia design
  • Manual knob
  • Motor controller sold separately

SMC Stepping or YMC Synchronous Motor Controllers


FRMRE-275-38/SCC (shown with optional /SCC speed control
motor drive)

/SCC Speed Control Motor Drive
Model Number: /SCC Price: add $1,005
Applications: continuous rotation with variable speed, no position feedback

  • Variable speed
  • Switchable direction
  • 5 - 95 RPM with 50 oz-in torque
  • Options:
    Higher torque motors
    Different speed ranges
  • Includes Controller

Additional Illustrations

FRRMRE-75/MS-38/SCC (shown with optional /MS stepper motor drive and /SCC speed control motor drive) Commonly used for PLD applications




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