Thermionics Vacuum Products 1-800-962-2310
sales@thermionics.com
September 2010



How can we help you?


We are growing and looking for sales representatives to join our team. Contact Us to learn more.




Ultra High Vacuum Compound Precision Manipulators FM Series


Description

[FM-103-1.04-2-2-8/PLR-1]
FM Manipulator
The FM series compound precision manipulators utilize two bellows. A large I.D. short bellows located at the base of the unit is used to provide the XY operating range. A smaller I.D. bellows supplies the Z axis travel. This approach provides considerable savings over the single large I.D. bellows systems, where a clear bore is not required and significant Z travel is needed.

These units are available with ±0.5"or ±1" of X and Y travel, with XY bellows up to 4". They can be supplied with Z travel of up to 36" or more, with Z bellows I.D. up to 2.5".

The FM series may be mounted vertically or horizontally. Horizontal mounting packages are available with custom-rated counter-balance springs to maintain instrument positioning. The Z stage can be separated from the XY stage.

Support tubes, probe supports and other accessories are available.

Support Tube Stabilization
A non-rotating tubular probe support option (/PL) is available. The probe support tube is stabilized by a stainless steel linear bearing mounted at the base of the Z travel system. The linear bearing dramatically improves the stability of the probe. The bearing can be modified to allow probe polar rotation as well as polar axis linear travel (/PLR).

Utility Rotation
In addition, differentially pumped rotary seals (RNN™) can be fitted to these manipulators. They provide an additional degree of rotary freedom for the customers' equipment. This system provides an excellent method of utility delivery without utility line motion in a vacuum.


Specifications

Motion Specifications
X axis resolution <0.0001" (0.0025 mm)
repeatability <0.0001" (0.0025 mm)
backlash <0.00015" (0.0038 mm)
Y axis resolution <0.0001" (0.0025 mm)
repeatability <0.0001" (0.0025 mm)
backlash <0.00015" (0.0038 mm)
Z axis resolution <0.0005" (0.0127 mm)
repeatability <0.0005" (0.0127 mm)
backlash <0.0007" (0.0178 mm)
X & Y Axes
  • ±0.5" or ±1" X and Y travel, circular pattern, standard, 0.001" micrometer divisions
    small micrometers (large micrometers, 0.0001" divisions optional)
Z Axis
  • 2" to 36" Z travel, gearbox Acme drive, 0.100"/turn (10 turns/inch), 0.001" divisions, position lock; comes with extended backframe
Base Flange
  • 6" O. D. UHV base flange
Traveling Flange
  • 2.75" O. D. traveling flange
Features
  • Extended backframe
  • Hardened stainless steel bearings and guide rods throughout
  • All XY bearings adjustable
  • Maximum bakeout temperature: 200°C, fully assembled

Ordering Information

3-Axis Ultra High Vacuum Precision Manipulators
XY
ID
Z
ID
X & Y
Travel
Dimensions Model No. Price Addl.
Z Travel
Per Inch **
A B C min* D
2.5"
1.53”
±0.5"
FM-102.5-1.53-1-1-2 Contact Contact
1.87”
±0.5"
FM-102.5-1.87-1-1-2 Contact Contact
3"
1.53”
±0.5"
FM-103-1.53-1-1-2 Contact Contact
±1"
FM-103-1.53-2-2-2 Contact Contact
1.87”
±0.5"
11.0" 10.0"
6.58"
15.5"
FM-103-1.87-1-1-2 Contact Contact
±1"
13.5"
10.0"
7.29”
16.4”
FM-103-1.87-2-2-2 Contact
2.50”
±0.5"
FM-103-2.5-1-1-2 Contact Contact
±1"
FM-103-2.5-2-2-2 Contact Contact
4"
1.53
±0.5"
FM-104-1.53-1-1-2 Contact Contact
±1"
FM-104-1.53-2-2-2 Contact Contact
1.87"
±0.5"
11.0"
10.0"
6.79"
15.7"
FM-104-1.87-1-1-2 Contact Contact
±1"
13.8"
10.3"
8.47"
17.4"
FM-104-1.87-2-2-2 Contact Contact
2.50"
±0.5"
Contact
FM-104-2.5-1-1-2 Contact Contact
±1"
FM-104-2.5-2-2-2 Contact Contact
* NOTE: This equipment has the shortest possible minimum flange-to-flange "C min" dimension. This distance can be changed by a large number of possible options. The C min dimension shown is only for the exact model listed. Please consult the factory for further information.

** Additional Z travel is available in 2" increments.


Options

Option: 8.0" O.D. Base Flange Model No: /B-8 additional Contact
Change base flange to 8.0" O.D. (tapped). This option may be ordered with any model.

Option: 10.0" O.D. Base Flange Model No: /B-10 additional Contact
Change base flange to 10.0" O.D. (tapped). This option may be ordered with any model.

Option: XY Micrometers, ±0.5" travel Model No: /LM Contact for Pricing
Large micrometers with 0.0001" divisions. Set of two.

Option: XY Micrometers, ±1.0" travel Model No: /LM Contact for Pricing
Large micrometers with 0.0001" divisions. Set of two.

Option: Custom Support Tube Model No: /ST-.75 additional Contact
  • 0.75" to 2.0" O.D.
  • End bearing support for rotary shaft
  • Length specified by customer

Option: Motorization Model No: /MS Stepping or /MY Synchronous Motor Drive
See our Motor Drives page.

Option: Lifting Package Model No: /LP additional Contact
  • Stainless steel lifting eyes
  • Custom sling assembly
  • Suitable for up to 200 lbs. systems

Option: Lifting Handles Model No: /LH Contact
  • Stainless steel lifting handles
  • Contact for application

Option: Horizontal Mounting Package Model No: /HMP additional Contact
  • Suitable for models with up to 6" Z travel
  • Base flange modified as needed
  • Oversized guide rods
  • Two force spring assemblies, custom force level based on customer payload

Option: Probe Support - Linear Model No: /PL-()  
Adds linear all stainless steel bearing at base of Z stage

Tube O.D.Model No.Price
1.00"/PL-1 Contact
1.50"/PL-1.5* Contact
2.00"/PL-2 Contact
NOTE: 1.87" bellows recommended for 1.5" probes.

Option: Probe Support - Linear-rotary Model No: /PLR-() or /PTF-()
Adds linear-rotary all stainless steel or Teflon bearing. Commonly used with RNN series rotary platform and rotating support tube

Tube O.D. SS Model No. SS Price Teflon Model No. Teflon Price
1.00" /PLR-1 Contact /PTF-1 Contact
1.50" /PLR-1.5 Contact /PTF-1.5*Contact
2.00" /PLR-2 Contact /PTF-2 Contact
NOTE: 1.87" bellows recommended for 1.5" probes.



Copyright (C) 2010 TLI Enterprises and its Subsidiaries. All Rights Reserved.

By accessing and using this Web Site you agree to be bound by the Terms and Conditions of Use. We respect your privacy. Trademarks.


Some content, including important notices and agreements, may be in Adobe Acrobat (PDF) format.
Download Adobe Acrobat Reader for Free (new window)