Description

FM Manipulator

The FM series compound precision manipulators utilize two bellows. A large I.D. short bellows located at the base of the unit is used to provide the XY operating range. A smaller I.D. bellows supplies the Z axis travel. This approach provides considerable savings over the single large I.D. bellows systems, where a clear bore is not required and significant Z travel is needed.

These units are available with ±0.5"or ±1" of X and Y travel, with XY bellows up to 4". They can be supplied with Z travel of up to 36" or more, with Z bellows I.D. up to 2.5".

The FM series may be mounted vertically or horizontally. Horizontal mounting packages are available with custom-rated counter-balance springs to maintain instrument positioning. The Z stage can be separated from the XY stage.

Support tubes, probe supports and other accessories are available.

Support Tube Stabilization
A non-rotating tubular probe support option (/PL) is available. The probe support tube is stabilized by a stainless steel linear bearing mounted at the base of the Z travel system. The linear bearing dramatically improves the stability of the probe. The bearing can be modified to allow probe polar rotation as well as polar axis linear travel (/PLR).

Utility Rotation
In addition, differentially pumped rotary seals (RNN™) can be fitted to these manipulators. They provide an additional degree of rotary freedom for the customers' equipment. This system provides an excellent method of utility delivery without utility line motion in a vacuum.

Specifications

Motion Specifications
X axis	resolution <0.0001" (0.0025 mm) repeatability <0.0001" (0.0025 mm) backlash <0.00015" (0.0038 mm)
Y axis	resolution <0.0001" (0.0025 mm) repeatability <0.0001" (0.0025 mm) backlash <0.00015" (0.0038 mm)
Z axis	resolution <0.0005" (0.0127 mm) repeatability <0.0005" (0.0127 mm) backlash <0.0007" (0.0178 mm)

X & Y Axes

• ±0.5" or ±1" X and Y travel, circular pattern, standard, 0.001" micrometer divisions
  small micrometers (large micrometers, 0.0001" divisions optional)

Z Axis

• 2" to 36" Z travel, gearbox Acme drive, 0.100"/turn (10 turns/inch), 0.001" divisions, position lock; comes with extended backframe

Base Flange

• 6" O. D. UHV base flange

Traveling Flange

• 2.75" O. D. traveling flange

Features

• Extended backframe
• Hardened stainless steel bearings and guide rods throughout
• All XY bearings adjustable
• Maximum bakeout temperature: 200°C, fully assembled