Our online catalog is being updated! Please contact us for current pricing. Ultra High Vacuum Compound Precision Manipulators FM Series Description FM Manipulator The FM series compound precision manipulators utilize two bellows. A large I.D. short bellows located at the base of the unit is used to provide the XY operating range. A smaller I.D. bellows supplies the Z axis travel. This approach provides considerable savings over the single large I.D. bellows systems, where a clear bore is not required and significant Z travel is needed. These units are available with ±0.5"or ±1" of X and Y travel, with XY bellows up to 4". They can be supplied with Z travel of up to 36" or more, with Z bellows I.D. up to 2.5". The FM series may be mounted vertically or horizontally. Horizontal mounting packages are available with custom-rated counter-balance springs to maintain instrument positioning. The Z stage can be separated from the XY stage. Support tubes, probe supports and other accessories are available. Support Tube Stabilization A non-rotating tubular probe support option (/PL) is available. The probe support tube is stabilized by a stainless steel linear bearing mounted at the base of the Z travel system. The linear bearing dramatically improves the stability of the probe. The bearing can be modified to allow probe polar rotation as well as polar axis linear travel (/PLR). Utility Rotation In addition, differentially pumped rotary seals (RNN) can be fitted to these manipulators. They provide an additional degree of rotary freedom for the customers' equipment. This system provides an excellent method of utility delivery without utility line motion in a vacuum. Specifications Motion Specifications X axis resolution <0.0001" (0.0025 mm) repeatability <0.0001" (0.0025 mm) backlash <0.00015" (0.0038 mm) Y axis resolution <0.0001" (0.0025 mm) repeatability <0.0001" (0.0025 mm) backlash <0.00015" (0.0038 mm) Z axis resolution <0.0005" (0.0127 mm) repeatability <0.0005" (0.0127 mm) backlash <0.0007" (0.0178 mm) X & Y Axes ±0.5" or ±1" X and Y travel, circular pattern, standard, 0.001" micrometer divisions small micrometers (large micrometers, 0.0001" divisions optional) Z Axis 2" to 36" Z travel, gearbox Acme drive, 0.100"/turn (10 turns/inch), 0.001" divisions, position lock; comes with extended backframe Base Flange 6" O. D. UHV base flange Traveling Flange 2.75" O. D. traveling flange Features Extended backframe Hardened stainless steel bearings and guide rods throughout All XY bearings adjustable Maximum bakeout temperature: 200°C, fully assembled Ordering Information 3-Axis Ultra High Vacuum Precision Manipulators XY ID Z ID X & Y Travel Dimensions Model No. Price Addl. Z Travel Per Inch ** A B C min* D 2.5" 1.53” ±0.5" Consult factory FM-102.5-1.53-1-1-2 $6,685. $280. 1.87” ±0.5" Consult factory FM-102.5-1.87-1-1-2 $6,960. $310. 3" 1.53” ±0.5" Consult factory FM-103-1.53-1-1-2 $6,750. $280. ±1" FM-103-1.53-2-2-2 $7,700. $280. 1.87” ±0.5" 11.0" 10.0" 6.58" 15.5" FM-103-1.87-1-1-2 $7,225. $310. ±1" 13.5" 10.0" 7.29” 16.4” FM-103-1.87-2-2-2 $8,175. $310. 2.50” ±0.5" Consult Factory FM-103-2.5-1-1-2 $8,120. $340. ±1" FM-103-2.5-2-2-2 $9,070. $340. 4" 1.53 ±0.5" Consult factory FM-104-1.53-1-1-2 $7,490. $280. ±1" FM-104-1.53-2-2-2 $9,500. $280. 1.87" ±0.5" 11.0" 10.0" 6.79" 15.7" FM-104-1.87-1-1-2 $7,965. $310. ±1" 13.8" 10.3" 8.47" 17.4" FM-104-1.87-2-2-2 $9,975. $310. 2.50" ±0.5" Consult Factory FM-104-2.5-1-1-2 $8,860. $340. ±1" FM-104-2.5-2-2-2 $10,870. $340. * NOTE: This equipment has the shortest possible minimum flange-to-flange "C min" dimension. This distance can be changed by a large number of possible options. The C min dimension shown is only for the exact model listed. Please consult the factory for further information. ** Additional Z travel is available in 2" increments. Options Option: 8.0" O.D. Base Flange Model No: /B-8 additional $225 Change base flange to 8.0" O.D. (tapped). This option may be ordered with any model. Option: 10.0" O.D. Base Flange Model No: /B-10 additional $365 Change base flange to 10.0" O.D. (tapped). This option may be ordered with any model. Option: XY Micrometers, ±0.5" travel Model No: /LM Consult Factory for Pricing Large micrometers with 0.0001" divisions. Set of two. Option: XY Micrometers, ±1.0" travel Model No: /LM Consult Factory for Pricing Large micrometers with 0.0001" divisions. Set of two. Option: Custom Support Tube Model No: /ST-.75 additional $450 0.75" to 2.0" O.D. End bearing support for rotary shaft Length specified by customer Option: Motorization Model No: /MS Stepping or /MY Synchronous Motor Drive See our Motor Drives page. Option: Lifting Package Model No: /LP additional $265 Stainless steel lifting eyes Custom sling assembly Suitable for up to 200 lbs. systems Option: Lifting Handles Model No: /LH consult factory Stainless steel lifting handles Consult factory for application Option: Horizontal Mounting Package Model No: /HMP additional $1,485 Suitable for models with up to 6" Z travel Base flange modified as needed Oversized guide rods Two force spring assemblies, custom force level based on customer payload Option: Probe Support - Linear Model No: /PL-()   Adds linear all stainless steel bearing at base of Z stage Tube O.D. Model No. Price 1.00" /PL-1 $795. 1.50" /PL-1.5* $1,000. 2.00" /PL-2 $1,215. NOTE: 1.87" bellows recommended for 1.5" probes. Option: Probe Support - Linear-rotary Model No: /PLR-() or /PTF-() Adds linear-rotary all stainless steel or Teflon bearing. Commonly used with RNN series rotary platform and rotating support tube Tube O.D. SS Model No. SS Price Teflon Model No. Teflon Price 1.00" /PLR-1 $1,150. /PTF-1 $550. 1.50" /PLR-1.5 $1,775. /PTF-1.5* $770. 2.00" /PLR-2 $1,840. /PTF-2 $885. NOTE: 1.87" bellows recommended for 1.5" probes.