Our online catalog is being updated! Please contact us for current pricing. Precision XYZ Manipulator EMX Series Description The EMX Series XYZ manipulator is a new addition to Thermionics' manipulator line. This manipulator provides large I.D. bellows for clear-bore access into your UHV chamber. EMX Manipulator (shown with custom bellows, optional Large Micrometers, and RNN™) Features 2.0", 2.5" and 3.0" I.D. bellows Hardened X & Y cross roller guides 0.75" O.D. hardened stainless steel Z guide rods Hardened stainless steel linear bearings All stainless steel XYZ guide system X micrometer location interchangeable Aluminum stage construction Stainless steel only material exposed to vacuum Maximum bakeout temperature: 200°C 5 year guarantee Specifications X & Y Axes ± 0.5" or ± 1.0" X & Y travel, circular pattern, pre-loaded micrometer to stage coupling, 0.001" micrometer divisions, small micrometers standard (large drum dial micrometers optional) Z Axis 2" - 36" Z travel, 4:1 worm acme gearbox, 0.050"/turn, 20 turns/inch, 0.001" divisions, position lock Base Flange 4.50" O.D., clearance (4.62" base flange standard on 3.00" I.D. bellows) Optional sizes: 6.00" and 8.00" Traveling Flange 4.50" O.D, tapped (4.62" traveling flange standard on 3.00" I.D. bellows) Optional size: 2.75" Ordering Information with 2" Z Travel Bellows I.D. X&Y Travel Model No. Price Addl. Z Travel Per Inch* 2.0 ± 0.5" EMX-2.0-1-1-2 $ 4,950 $ 280 2.5 ± 0.5" EMX-2.5-1-1-2 $ 5,375 $ 300 ± 1.0" EMX-2.5-2-2-2 $ 6,850 $ 300 3.0 ± 0.5" EMX-3.0-1-1-2 $ 7,325 $ 390 ± 1.0" EMX-3.0-2-2-2 $ 8,900 $ 390 * Available in 2 inch increments Options Option: 6" Base Flange Model No: /B-6 additional $85 Change base flange to 6.0" O.D. This option may be ordered with any model. Option: 6" Base Flange with 5 mini-ports Model No: /B-6M additional $385 Change base flange to 6.0" O.D. with 5 mini-ports. This option may only be ordered with the 1.39" I. D. bellows. Option: 8.0" O.D. Base Flange Model No: /B-8 additional $225 Change base flange to 8.0" O.D. Option: XY Micrometers, ±0.5" travel Model No: /LM Consult Factory for Pricing Large micrometers with 0.0001" divisions. Set of two. Option: XY Micrometers, ±1.0" travel Model No: /LM Consult Factory for Pricing Large micrometers with 0.0001" divisions. Set of two. Option: Custom Support Tube Model No: /ST-.75 additional $450 0.75" O.D. End bearing support for rotary shaft Length specified by customer Option: Stepping Motor Drive Model No: /SMC   See our Motor Controllers page. Option: Motorization Model No: /MS Stepping or /MY Synchronous Motor Drive See our Motor Drives page.