Our online catalog is being updated! Please contact us for current pricing. EUV Reflectometer Thermionics designed and built the EUV Reflectometer to measure the reflectivity of and map the uniformity of large multilayer mirrors for optical applications in astronomy and lithography. Reflectometer Details Chamber Size 64 inches diameter 122 inches long Weight (with goniometer) 14,400 lbs. Pressure 10-10 Torr Range Maximum Bakeout 150°C Sample size Up to 14” diameter, up to 6” thick Sample weight Up to 100 lbs. Axes of Motion Goniometer: 6 Detector Arm: 2 This spectrometer, designed for and installed at a national laboratory, features a unique virtual axis goniometer that allows glancing angle studies of up to 90° normal to sample plane. A large portion of the 14” diameter x 6” thick mirror sample can be positioned as the sample pivot. A detector arm employs two motions to follow and scan the surface of the mirror as it moves in six directions. Virtual Axis Goniometer allows glancing angle studies. Axes of Motion Goniometer Axis Range Resolution 1 ±95° 0.01° 2 ±30° 0.01° 3 ±7” 0.0003” 4 ±2” 0.0004” 5 360° 0.01° 6 0” to 2” 0.0004” Detector Arm Range Resolution 1 360° 0.01° 2 ±30° 0.18°