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September 2010



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EUV Reflectometer


Scientist with chamber
Thermionics designed and built the EUV Reflectometer to measure the reflectivity of and map the uniformity of large multilayer mirrors for optical applications in astronomy and lithography.

Reflectometer Details

Chamber Size
64 inches diameter
122 inches long

Weight (with goniometer)
14,400 lbs.

Pressure
10-10 Torr Range

Maximum Bakeout
150°C

 Sample size
Up to 14” diameter, up to 6” thick

Sample weight
Up to 100 lbs.

Axes of Motion
Goniometer: 6
Detector Arm: 2

This spectrometer, designed for and installed at a national laboratory, features a unique virtual axis goniometer that allows glancing angle studies of up to 90° normal to sample plane. A large portion of the 14” diameter x 6” thick mirror sample can be positioned as the sample pivot. A detector arm employs two motions to follow and scan the surface of the mirror as it moves in six directions.

Virtual Axis Goniometer — Any point of the 3-dimensional sample mass
Virtual Axis Goniometer allows glancing angle studies.



Axes of Motion

Goniometer Axis Range Resolution
theta1 ±95° 0.01°
theta2 ±30° 0.01°
theta3 ±7” 0.0003”
theta4 ±2” 0.0004”
theta5 360° 0.01°
theta6 0” to 2” 0.0004”
Detector Arm Range Resolution
alpha1 360° 0.01°
alpha2 ±30° 0.18°


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