Thermionics Vacuum Products 1-800-962-2310
sales@thermionics.com
Office Hours: 8am to 5pm PST
May 2008


How can we help you?

Pumps

Valves

Flanges, Fittings and Hardware

Motion Feedthroughs

Sample Handling

Thin Film Deposition

Pressure Measurement

Chambers and Accessories

Helium Leak Detectors

Custom Systems

Web Specials


Request a Catalog

Jobs at Thermionics




Our online catalog is being updated! Please contact us for current pricing.

EUV Reflectometer


Scientist with chamber
Thermionics designed and built the EUV Reflectometer to measure the reflectivity of and map the uniformity of large multilayer mirrors for optical applications in astronomy and lithography.

Reflectometer Details

Chamber Size
64 inches diameter
122 inches long

Weight (with goniometer)
14,400 lbs.

Pressure
10-10 Torr Range

Maximum Bakeout
150°C

Sample size
Up to 14” diameter, up to 6” thick

Sample weight
Up to 100 lbs.


Axes of Motion
Goniometer: 6
Detector Arm: 2


This spectrometer, designed for and installed at a national laboratory, features a unique virtual axis goniometer that allows glancing angle studies of up to 90° normal to sample plane. A large portion of the 14” diameter x 6” thick mirror sample can be positioned as the sample pivot. A detector arm employs two motions to follow and scan the surface of the mirror as it moves in six directions.

Virtual Axis Goniometer — Any point of the 3-dimensional sample mass
Virtual Axis Goniometer allows glancing angle studies.



Axes of Motion
Goniometer Axis Range Resolution
theta1 ±95° 0.01°
theta2 ±30° 0.01°
theta3 ±7” 0.0003”
theta4 ±2” 0.0004”
theta5 360° 0.01°
theta6 0” to 2” 0.0004”
Detector Arm Range Resolution
alpha1 360° 0.01°
alpha2 ±30° 0.18°


Copyright (C) 2008 TLI Enterprises and its Subsidiaries. All Rights Reserved.

By accessing and using this Web Site you agree to be bound by the Terms and Conditions of Use. We respect your privacy.


Some content, including important notices and agreements, may be in Adobe Acrobat (PDF) format.
Download Adobe Acrobat Reader for Free (new window)